Job Summary

We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:

Process Development & Optimization

- Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
- Establish recipes for:
- Non-selective Si epitaxy
- In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
- Thick and thin epi layers
- High-voltage and power device epi requirements
- Optimize critical parameters including:
- Growth rate
- Thickness uniformity
- Doping concentration and uniformity
- Defectivity
- Crystal quality
- Surface roughness
- Haze and morphology
- Evaluate process windows and define control plans.

Ownerships

- Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
- Drive equipment matching and chamber-to-chamber consistency.
- Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
- Work with Equipment Engineering to improve:
- Uptime
- MTBF
- Throughput
- Process capability

Yield & Defect Reduction

- Investigate excursions using SPC and data analytics.
- Drive reduction of:
- Stacking faults
- Slip lines
- Crystal defects
- Autodoping
- Transition widths
- Contamination issues
- Perform root cause analysis and implement corrective actions.

Process Characterization

- Analyze and interpret metrology data from:




- SIMS
- CV Profiling
- XRD
- TEM
- SEM
- AFM
- Optical Inspection
- FTIR
- Four Point Probe
- Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support

- Support NPI and technology ramp activities.
- Transfer epitaxy processes from development to manufacturing.
- Generate process specifications, FDC limits, OCAPs, and control plans.
- Provide manufacturing support for yield and output improvement initiatives.

Cross-Functional Collaboration

- Partner with:
- Device Engineering
- Process Integration
- Manufacturing
- Yield Engineering
- Quality
- Equipment Engineering
- EHS
- Coordinate with suppliers and OEMs for process and hardware improvements.

Required Qualifications

Education

- B.Tech/ M.Tech / Ph.D. in:
- Materials Science
- Electrical Engineering
- Chemical Engineering
- Physics
- Semiconductor Engineering

Experience

- 4+ years of semiconductor process engineering experience.
- 3+ years of hands-on experience in Silicon Epitaxy.
- Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Technical Skills:

Epitaxy Process Knowledge

- Silicon homoepitaxy fundamentals
- Gas chemistry:
- DCS (Dichlorosilane)
- TCS (Trichlorosilane)
- Silane
- HCl chemistry
- In-situ doping:
- B₂H₆
- PH₃
- AsH₃
- Auto-doping control
- Defect engineering

Equipment Knowledge

- ASM Epsilon Series
- ASM Intrepid
- AMAT Centura RP Epi
- AMAT Epi Systems
- Knowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.

Data Analysis

- JMP
- Spotfire
- Python
- Minitab
- SPC/FDC systems
- DOE methodology
- Statistical analysis and process capability evaluation

📌 Senior/Principal Process Engineer – Silicon Epitaxy (Si-Si Epi) (Dholera)
🏢 Tata Electronics
📍 Dholera