Job SummaryWe are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.Key Responsibilities:Process Development & OptimizationDevelop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.Establish recipes for:Non-selective Si epitaxyIn-situ doped epitaxy (Boron, Phosphorus, Arsenic)Thick and thin epi layersHigh-voltage and power device epi requirementsOptimize critical parameters including:Growth rateThickness uniformityDoping concentration and uniformityDefectivityCrystal qualitySurface roughnessHaze and morphologyEvaluate process windows and define control plans.OwnershipsOwn and sustain ASM Intrepid and/or AMAT Centura Epi platforms.Drive equipment matching and chamber-to-chamber consistency.Lead process qualifications following preventive maintenance, hardware changes,



and chamber rebuilds.Work with Equipment Engineering to improve:UptimeMTBFThroughputProcess capabilityYield & Defect ReductionInvestigate excursions using SPC and data analytics.Drive reduction of:Stacking faultsSlip linesCrystal defectsAutodopingTransition widthsContamination issuesPerform root cause analysis and implement corrective actions.Process CharacterizationAnalyze and interpret metrology data from:SIMSCV ProfilingXRDTEMSEMAFMOptical InspectionFTIRFour Point ProbeCorrelate material characteristics with electrical and device performance.Technology Transfer & Production SupportSupport NPI and technology ramp activities.Transfer epitaxy processes from development to manufacturing.Generate process specifications, FDC limits, OCAPs, and control plans.Provide manufacturing support for yield and output improvement initiatives.Cross-Functional CollaborationPartner with:Device EngineeringProcess IntegrationManufacturingYield EngineeringQualityEquipment EngineeringEHSCoordinate with suppliers and OEMs for process and hardware improvements.Required QualificationsEducationB.Tech/ M.Tech / Ph.D. in:Materials ScienceElectrical EngineeringChemical EngineeringPhysicsSemiconductor EngineeringExperience4+ years of semiconductor process engineering experience.3+ years of hands-on experience in Silicon Epitaxy.Experience with ASM and/or Applied Materials Epi tools is highly preferred.Technical Skills:Epitaxy Process KnowledgeSilicon homoepitaxy fundamentalsGas chemistry:DCS (Dichlorosilane)TCS (Trichlorosilane)SilaneHCl chemistryIn-situ doping:B₂H₆PH₃AsH₃Auto-doping controlDefect engineeringEquipment KnowledgeASM Epsilon SeriesASM IntrepidAMAT Centura RP EpiAMAT Epi SystemsKnowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.Data AnalysisJMPSpotfirePythonMinitabSPC/FDC systemsDOE methodologyStatistical analysis and process capability evaluation

📌 Senior/Principal Process Engineer – Silicon Epitaxy (Si-Si Epi) (Ahmedabad)
🏢 Tata Electronics
📍 Ahmedabad