Job Summary
We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:
Process Development & Optimization
Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
Establish recipes for:
Non-selective Si epitaxy
In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
Thick and thin epi layers
High-voltage and power device epi requirements
Optimize critical parameters including:
Growth rate
Thickness uniformity
Doping concentration and uniformity
Defectivity
Crystal quality
Surface roughness
Haze and morphology
Evaluate process windows and define control plans.

Ownerships
Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
Drive equipment matching and chamber-to-chamber consistency.
Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
Work with Equipment Engineering to improve:
Uptime
MTBF
Throughput
Process capability

Yield & Defect Reduction
Investigate excursions using SPC and data analytics.
Drive reduction of:
Stacking faults
Slip lines
Crystal defects
Autodoping
Transition widths
Contamination issues
Perform root cause analysis and implement corrective actions.

Process Characterization
Analyze and interpret metrology data from:




SIMS
CV Profiling
XRD
TEM
SEM
AFM
Optical Inspection
FTIR
Four Point Probe
Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support
Support NPI and technology ramp activities.
Transfer epitaxy processes from development to manufacturing.
Generate process specifications, FDC limits, OCAPs, and control plans.
Provide manufacturing support for yield and output improvement initiatives.

Cross-Functional Collaboration
Partner with:
Device Engineering
Process Integration
Manufacturing
Yield Engineering
Quality
Equipment Engineering
EHS
Coordinate with suppliers and OEMs for process and hardware improvements.
Required Qualifications
Education
B.Tech/ M.Tech / Ph.D. in:
Materials Science
Electrical Engineering
Chemical Engineering
Physics
Semiconductor Engineering

Experience
4+ years of semiconductor process engineering experience.
3+ years of hands-on experience in Silicon Epitaxy.
Experience with ASM and/or Applied Materials Epi tools is highly preferred.

Technical Skills:
Epitaxy Process Knowledge
Silicon homoepitaxy fundamentals
Gas chemistry:
DCS (Dichlorosilane)
TCS (Trichlorosilane)
Silane
HCl chemistry
In-situ doping:
B₂H₆
PH₃
AsH₃
Auto-doping control
Defect engineering

Equipment Knowledge
ASM Epsilon Series
ASM Intrepid
AMAT Centura RP Epi
AMAT Epi Systems
Knowledge of reactor hardware, gas delivery, wafer handling, and thermal systems.

Data Analysis
JMP
Spotfire
Python
Minitab
SPC/FDC systems
DOE methodology
Statistical analysis and process capability evaluation

📌 Senior/Principal Process Engineer – Silicon Epitaxy (Si-Si Epi) (Ahmedabad)
🏢 Tata Electronics
📍 Ahmedabad