Job Summary
We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:
Process Development & Optimization
- Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
- Establish recipes for:
- Non-selective Si epitaxy
- In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
- Thick and thin epi layers
- High-voltage and power device epi requirements
- Optimize critical parameters including:
- Growth rate
- Thickness uniformity
- Doping concentration and uniformity
- Defectivity
- Crystal quality
- Surface roughness
- Haze and morphology
- Evaluate process windows and define control plans.

Ownerships




- Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
- Drive equipment matching and chamber-to-chamber consistency.
- Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
- Work with Equipment Engineering to improve:
- Uptime
- MTBF
- Throughput
- Process capability

Yield & Defect Reduction
- Investigate excursions using SPC and data analytics.
- Drive reduction of:
- Stacking faults
- Slip lines
- Crystal defects
- Autodoping
- Transition widths
- Contamination issues
- Perform root cause analysis and implement corrective actions.

Process Characterization
- Analyze and interpret metrology data from:
- SIMS
- CV Profiling
- XRD
- TEM
- SEM
- AFM
- Optical Inspection
- FTIR
- Four Point Probe
- Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support
- Support NPI and technology ramp activities.
- Trans

📌 Senior/Principal Process Engineer – Silicon Epitaxy (India)
🏢 Tata Electronics
📍 India