Job Summary
We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:
Process Development & Optimization
• Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
• Establish recipes for:
• Non-selective Si epitaxy
• In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
• Thick and thin epi layers
• High-voltage and power device epi requirements
• Optimize critical parameters including:
• Growth rate
• Thickness uniformity
• Doping concentration and uniformity
• Defectivity
• Crystal quality
• Surface roughness
• Haze and morphology
• Evaluate process windows and define control plans.

Ownerships




• Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
• Drive equipment matching and chamber-to-chamber consistency.
• Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
• Work with Equipment Engineering to improve:
• Uptime
• MTBF
• Throughput
• Process capability

Yield & Defect Reduction
• Investigate excursions using SPC and data analytics.
• Drive reduction of:
• Stacking faults
• Slip lines
• Crystal defects
• Autodoping
• Transition widths
• Contamination issues
• Perform root cause analysis and implement corrective actions.

Process Characterization
• Analyze and interpret metrology data from:
• SIMS
• CV Profiling
• XRD
• TEM
• SEM
• AFM
• Optical Inspection
• FTIR
• Four Point Probe
• Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support
• Support NPI and technology ramp activities.
• Trans

📌 Senior/Principal Process Engineer – Silicon Epitaxy (Dholera)
🏢 Tata Electronics
📍 Dholera