Job Summary

We are seeking a highly motivated Silicon Epitaxy Process Engineer responsible for the development, optimization, qualification, and sustaining of Si-Si epitaxial growth processes on 300mm wafers. The engineer will support ASM and/or Applied Materials epitaxy reactors and work closely with Integration, Device, Yield, Equipment, and Manufacturing teams to deliver robust epitaxial processes meeting quality, cost, cycle time, and yield targets.

Key Responsibilities:

Process Development & Optimization
Develop and optimize silicon epitaxial growth processes for CMOS, BCD, Power, Analog, and HV technologies.
Establish recipes for:
Non-selective Si epitaxy
In-situ doped epitaxy (Boron, Phosphorus, Arsenic)
Thick and thin epi layers
High-voltage and power device epi requirements
Optimize critical parameters including:
Growth rate
Thickness uniformity
Doping concentration and uniformity
Defectivity
Crystal quality
Surface roughness
Haze and morphology
Evaluate process windows and define control plans.

Ownerships




Own and sustain ASM Intrepid and/or AMAT Centura Epi platforms.
Drive equipment matching and chamber-to-chamber consistency.
Lead process qualifications following preventive maintenance, hardware changes, and chamber rebuilds.
Work with Equipment Engineering to improve:
Uptime
MTBF
Throughput
Process capability

Yield & Defect Reduction
Investigate excursions using SPC and data analytics.
Drive reduction of:
Stacking faults
Slip lines
Crystal defects
Autodoping
Transition widths
Contamination issues
Perform root cause analysis and implement corrective actions.

Process Characterization
Analyze and interpret metrology data from:
SIMS
CV Profiling
XRD
TEM
SEM
AFM
Optical Inspection
FTIR
Four Point Probe
Correlate material characteristics with electrical and device performance.

Technology Transfer & Production Support
Support NPI and technology ramp activities.
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📌 Senior/principal Process Engineer – Silicon Epitaxy Junagadh (India)
🏢 Tata Electronics
📍 India