– Slurry Systems Design Manager Project: Semiconductor Manufacturing Facility

Department: Engineering / Design

Position: Slurry Systems Design Manager

Experience: Minimum 10 years of relevant experience

Reporting To: Engineering Manager / Project Engineering Head

- Job Purpose

To lead slurry systems design and engineering for semiconductor manufacturing facilities, with particular focus on Chemical Mechanical Planarization (CMP) slurry storage, preparation, distribution, recirculation, and point-of-use delivery systems. The role is responsible for engineering design, hydraulic analysis, equipment selection, technical reviews, vendor coordination, multidisciplinary interfaces, and delivery of safe, reliable, and contamination-controlled slurry systems in accordance with project specifications and schedules.
- Key Responsibilities

- Slurry Systems Design
- Lead the design and engineering of slurry storage, preparation, transfer, distribution, and recirculation systems for semiconductor fabrication facilities.
- Develop design criteria and system configurations based on CMP tool requirements, slurry characteristics, consumption rates, and operating conditions.
- Review and develop Process Flow Diagrams (PFDs), Piping and Instrumentation Diagrams (P&IDs;), equipment layouts, and piping arrangements.
- Design slurry supply and return headers, recirculation loops, distribution units, and point-of-use connections.
- Coordinate slurry flow rates, pressure, temperature, consumption, and interface requirements with CMP equipment suppliers.
- Ensure appropriate provisions for system capacity, operational reliability, maintainability, and future expansion.
- Hydraulic Analysis and Equipment Sizing
- Perform and review hydraulic calculations, flow distribution analysis, pressure drop calculations, and pump sizing.
- Use hydraulic analysis software such as PIPE-FLO Professional, AFT Fathom, or equivalent tools for slurry network analysis, where appropriate.
- Select and size slurry pumps, storage tanks, mixing tanks, filters, and associated equipment.
- Evaluate slurry viscosity, density, solids concentration, particle-size distribution, and settling characteristics when establishing design parameters.
- Review pump operating points and system resistance to ensure stable delivery to CMP tools.
- Assess the need for flushing, recirculation, mixing, and draining based on slurry supplier and process tool requirements.

- Piping and Material Selection
- Select suitable piping materials, valves, fittings, pumps, tanks, seals, and wetted components based on slurry compatibility, cleanliness, and project specifications.
- Evaluate PFA, PTFE, PVDF, PP, and other approved materials for the intended slurry application.
- Review piping layouts for hydraulic performance, drainability, accessibility, maintainability, and minimization of dead legs.
- Ensure appropriate provisions for flushing, cleaning, drainage, and maintenance.
- Coordinate equipment connections, piping interfaces, and installation requirements with CMP tools and slurry package vendors.
- Slurry Quality and Contamination Control
- Establish design requirements for maintaining slurry quality from storage to point of use.




- Evaluate risks associated with sedimentation, particle agglomeration, contamination, and slurry degradation.
- Review requirements for agitation, mixing, recirculation, filtration, and particle control based on slurry supplier recommendations.
- Coordinate flow, pressure, differential pressure, and other instrumentation requirements.
- Ensure system design supports reliable slurry delivery and minimizes contamination risks and unplanned interruptions.
- Engineering Deliverables and Technical Reviews
- Prepare, review, and approve engineering deliverables within delegated authority, including:
- Design basis and system design criteria.
- PFDs and P&IDs.;
- Hydraulic calculations and pump sizing reports.
- Equipment datasheets and technical specifications.
- Line lists, valve lists, and instrument lists.
- Equipment layouts and piping drawings.
- BOQs, MTOs, and procurement specifications.
- Ensure technical consistency across drawings, calculations, specifications, and vendor documentation.
- Review design comments and ensure timely closure of technical issues.
- Maintain engineering document revisions and submission schedules.

- Vendor and Procurement Coordination
- Coordinate with CMP tool suppliers, slurry system package vendors, pump manufacturers, tank manufacturers, and filtration equipment suppliers.
- Review vendor proposals, drawings, datasheets, and technical submittals.
- Perform technical bid evaluations and resolve technical deviations and clarifications.
- Verify compliance with project specifications, process requirements, and equipment interface requirements.
- Coordinate vendor document approvals with procurement and project schedules.
- Identify design gaps and technical risks before purchase order release.

- Software and Digital Engineering
- Use PIPE-FLO Professional, AFT Fathom, or equivalent for hydraulic analysis, as applicable.
- Use AutoCAD for reviewing P&IDs;, piping layouts, and engineering drawings.
- Use Navisworks Manage for 3D model reviews, clash detection, and constructability coordination.
- Review models using Revit, Plant 3D, AVEVA E3D, or Smart 3D, depending on the project platform.
- Use Microsoft Excel for engineering calculations, data analysis, and equipment sizing.
- Use Bluebeam Revu or equivalent tools for drawing markups and technical document reviews.
- Validate software inputs, assumptions, and results against design criteria and vendor data.

- Multidisciplinary Coordination
- Coordinate with process, piping, electrical, instrumentation, HVAC, civil, structural, and wastewater engineering teams.
- Resolve equipment layout constraints, piping routing conflicts, utility interfaces, and maintenance access requirements.
- Participate in design reviews and 3D model coordination meetings.




- Coordinate slurry waste collection and interfaces with wastewater treatment systems.
- Provide engineering support for technical queries, installation, commissioning, and troubleshooting.
- Safety, Quality, and Compliance
- Ensure compliance with project specifications, applicable codes, and relevant semiconductor facility requirements.
- Participate in HAZID, HAZOP, and process risk assessments.
- Coordinate requirements for leak detection, containment, safe handling, and maintenance access, where applicable.
- Implement design checking and quality assurance procedures.
- Identify and mitigate risks related to process performance, contamination, constructability, and system reliability.
- Engineering Team and Schedule Management
- Plan engineering deliverables, design review milestones, and resource requirements.
- Allocate tasks and coordinate the work of slurry design engineers and designers.
- Monitor deliverable quality, progress, and compliance with project schedules.
- Coordinate design priorities with procurement, construction, and commissioning teams.
- Resolve technical issues and escalate critical constraints to project leadership.

- Qualifications and Experience
- Bachelor’s degree in Chemical Engineering, Mechanical Engineering, or a relevant engineering discipline.
- Minimum 10 years of relevant engineering experience in slurry systems, process utilities, piping design, or semiconductor facility engineering.
- Experience in semiconductor fabrication facilities is strongly preferred.
- Practical experience in CMP slurry supply, storage, distribution, recirculation, and point-of-use delivery is desirable.
- Experience in hydraulic analysis, equipment sizing, vendor coordination, and detailed engineering is required.

- Technical Competencies
- Solid understanding of slurry system design, PFDs, P&IDs;, hydraulic calculations, and pump selection.
- Knowledge of slurry properties, particle handling, sedimentation, contamination control, and filtration.
- Experience with pumps, storage tanks, mixing systems, filters, valves, piping, and instrumentation.
- Understanding of high-purity and chemical-resistant piping materials.
- Ability to review hydraulic models, interpret calculation results, and validate design assumptions.
- Strong technical documentation and interdisciplinary coordination skills.

- Key Performance Indicators
- Timely completion and approval of engineering deliverables.
- Compliance with CMP tool and slurry supplier requirements.
- Timely closure of design review comments and technical queries.
- Reduction of design clashes, engineering rework, and site-related design issues.
- Technical compliance of vendor packages and procurement documents.
- Achievement of agreed design quality, reliability, and contamination-control requirements.

- Key Competencies
- Technical leadership and engineering decision-making.
- Strong analytical and troubleshooting skills.
- Design planning and multidisciplinary coordination.
- Vendor management and technical evaluation.
- Quality assurance, risk management, and schedule control.

Effective communication and engineering team coordination.

📌 RCF Slurry Piping Design (Semiconductor) (Chennai)
🏢 Larsen u0026 Toubro
📍 Chennai